Title:
プローブの製造方法、プローブ、プローブ積層体、プローブ組立体およびプローブ組立体の製造方法
Document Type and Number:
Japanese Patent JP6548963
Kind Code:
B2
Inventors:
Kazuyuki Tsukuni
Hidehiro Kiyoto
Miyuki Fukami
Noboru Odabe
Hidehiro Kiyoto
Miyuki Fukami
Noboru Odabe
Application Number:
JP2015117863A
Publication Date:
July 24, 2019
Filing Date:
June 10, 2015
Export Citation:
Assignee:
Nippon Micronics Co., Ltd.
International Classes:
G01R1/067; G01R1/073; H01L21/66
Domestic Patent References:
| JP2010019616A | ||||
| JP2008026027A | ||||
| JP2008191027A | ||||
| JP2008164575A | ||||
| JP2013174523A | ||||
| JP2014085216A |
Foreign References:
| US20030155940 |
Attorney, Agent or Firm:
Masao Sekiguchi
Takamasa Nakano
Yusei Atsuya
Atsuko Oaku
Takamasa Nakano
Yusei Atsuya
Atsuko Oaku