Title:
インプリント装置、補正機構の校正方法、および物品の製造方法
Document Type and Number:
Japanese Patent JP6552185
Kind Code:
B2
Abstract:
An imprint apparatus includes a mold holding unit configured to hold a mold, a correction mechanism configured to correct a shape of a pattern formed in the mold to a desired shape by applying a force to the mold held in the mold holding unit, and a controller configured to assume a plurality of mold pattern shapes for a specific mold, calculate a parameter for associating the plurality of assumed mold pattern shapes and a deformation amount of the specific mold by causing the correction mechanism to apply the force to the specific mold to obtain the deformation amount of the specific mold so that the plurality of assumed mold pattern shapes are formed, and calibrate the correction mechanism using the parameter.
Inventors:
Kenichi Kobayashi
Application Number:
JP2014235282A
Publication Date:
July 31, 2019
Filing Date:
November 20, 2014
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| JP2013162045A | ||||
| JP2008511972A | ||||
| JP2005026462A |
Foreign References:
| US20030081193 |
Attorney, Agent or Firm:
Ryoichi Takaoka