Title:
真空バルブの圧力診断装置及び真空バルブ装置
Document Type and Number:
Japanese Patent JP6560928
Kind Code:
B2
Inventors:
Kazuhiro Sato
Kenji Tsuchiya
Kenji Tsuchiya
Application Number:
JP2015153800A
Publication Date:
August 14, 2019
Filing Date:
August 04, 2015
Export Citation:
Assignee:
Hitachi Industrial Equipment Systems Co., Ltd.
International Classes:
H01H33/668; H01H33/00
Domestic Patent References:
| JP55053840U | ||||
| JP64059165A | ||||
| JP62116265A | ||||
| JP2012190564A | ||||
| JP2009525583A | ||||
| JP61019020A | ||||
| JP2210729A | ||||
| JP7065676A |
Attorney, Agent or Firm:
Yuji Toda