Title:
電界効果型トランジスタ
Document Type and Number:
Japanese Patent JP6562068
Kind Code:
B2
Abstract:
To provide an insulating film having a low leakage current and a high dielectric constant in a printing process.SOLUTION: An ink for forming an insulating film for forming an oxide insulating film, the ink for forming an insulating film in which one or two or more alkali earth metal elements, and one or two or more metal elements from among Ga, Sc, Y, and lanthanoid (excluding Ce) are included in a solution, and a manufacturing method using the same, are provided thereby to solve the above-mentioned problem.SELECTED DRAWING: Figure 10
Inventors:
Naoyuki Ueda
Yuji Sone
Yuki Nakamura
Yukiko Abe
Yuji Sone
Yuki Nakamura
Yukiko Abe
Application Number:
JP2017243633A
Publication Date:
August 21, 2019
Filing Date:
December 20, 2017
Export Citation:
Assignee:
株式会社リコー
International Classes:
H01L21/316; H01L21/336; H01L29/786
Domestic Patent References:
| JP2003289140A | ||||
| JP2009182207A | ||||
| JP2010050434A | ||||
| JP2008516459A | ||||
| JP10506228A | ||||
| JP2007005028A | ||||
| JP2002033317A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito