Title:
インプリント装置、および物品の製造方法
Document Type and Number:
Japanese Patent JP6562795
Kind Code:
B2
Inventors:
Toshiya Asano
Takahiro Yoshida
Takahiro Yoshida
Application Number:
JP2015183245A
Publication Date:
August 21, 2019
Filing Date:
September 16, 2015
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02; H01L21/68; H01L21/683
Domestic Patent References:
| JP2008244441A | ||||
| JP2013538447A | ||||
| JP2014022527A | ||||
| JP2013021155A | ||||
| JP2013243315A | ||||
| JP2012060074A |
Foreign References:
| US20140239529 |
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu