Title:
ダイヤモンドライクカーボン膜、摺動部材、加工部材及びダイヤモンドライクカーボン膜の製造方法
Document Type and Number:
Japanese Patent JP6564977
Kind Code:
B2
Inventors:
Tokuda Yuki
Kawaguchi Masahiro
Takashi Ito
Takahiko Shiozaki
Kawaguchi Masahiro
Takashi Ito
Takahiko Shiozaki
Application Number:
JP2017040986A
Publication Date:
August 28, 2019
Filing Date:
March 03, 2017
Export Citation:
Assignee:
Tokyo Metropolitan Industrial Technology Research Center
Kurita Manufacturing Co., Ltd.
Kurita Manufacturing Co., Ltd.
International Classes:
C23C16/27; B23B27/14; B23B27/20; B24D3/00; C01B32/20
Domestic Patent References:
| JP2007136611A | ||||
| JP2006326690A | ||||
| JP4229277A | ||||
| JP2011122226A | ||||
| JP3240957A |
Other References:
V.N.Inkin,A superhard diamond-like carbon film,DIAMOND AND RELATED MATERIALS,2000年,VOL.9,p.715-721
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Hiroshi Fukuda
Kato Kazunori
Hiroshi Fukuda