Title:
基板処理装置、基板処理方法および記憶媒体
Document Type and Number:
Japanese Patent JP6580776
Kind Code:
B2
Inventors:
Kei Egashira
Hiroki Ohno
Hiroki Ohno
Application Number:
JP2018502600A
Publication Date:
September 25, 2019
Filing Date:
January 30, 2017
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304
Domestic Patent References:
| JP2013179244A | ||||
| JP2012222329A | ||||
| JP2013012538A |
Foreign References:
| US20080241499 |
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Hideyuki Mori
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Hideyuki Mori