Title:
検査装置及び磁気光学結晶の配置方法
Document Type and Number:
Japanese Patent JP6581081
Kind Code:
B2
Abstract:
An inspection device according to an aspect of the present invention includes a light source configured to output light, an MO crystal disposed to face a semiconductor device (D), an object lens configured to concentrate the light output from the light source onto the MO crystal, a holder configured to hold the MO crystal, a flexible member interposed between the MO crystal and the holder, and an object lens drive unit configured to cause the MO crystal to contact the semiconductor device (D) by causing the holder to be moved in the optical axis direction of the object lens, wherein, when the MO crystal contacts the semiconductor device (D), the flexible member is bent, so that an incident plane is inclined in a range in which an inclination angle of the incident plane of the light in the MO crystal with respect to a plane orthogonal to the optical axis is less than or equal to an aperture angle of the object lens.
Inventors:
Nakamura common rule
Application Number:
JP2016525190A
Publication Date:
September 25, 2019
Filing Date:
June 02, 2015
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01N27/72; G01R31/26; G01R31/302; H01L21/66
Domestic Patent References:
| JP2013544352A | ||||
| JP2006300879A | ||||
| JP4313057A | ||||
| JP7218425A | ||||
| JP5281313A |
Foreign References:
| WO2014050907A1 | ||||
| US5149962 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yasushi Naito
Yoshiki Kuroki
Kenichi Shibayama
Yasushi Naito