Title:
圧電素子、液体噴射ヘッド、及び、液体噴射装置
Document Type and Number:
Japanese Patent JP6582653
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric element in which occurrence of cracking in a piezoelectric layer can be suppressed more reliably, and to provide a liquid injection head, and a liquid injector.SOLUTION: A piezoelectric element includes a diaphragm 21 consisting of a first region where deflective deformation is allowable, and a second region where deflective deformation is blocked, a piezoelectric element body 19 where a lower electrode layer 27, a piezoelectric layer 28, and an upper electrode layer 29 are laminated on the first region of the diaphragm 21, and a common metal layer 30 laminated on the upper electrode layer 29 via a common adhesion layer 35. A part of the piezoelectric element body 19 is extended to the second region, and in a region on the extension side, the end of the piezoelectric layer 28 is extended to the farther outside than the end of the upper electrode layer 29 on the same side, and the common metal layer 30 and a common adhesion layer 35 are extended from the first region to the second region beyond the end of the upper electrode layer 29, in a region on the extension side, and an insulating protective film 43 is formed between the common adhesion layer 35 and piezoelectric layer 28, in a region deviated from the upper electrode layer 29.SELECTED DRAWING: Figure 5
Inventors:
Youichi Naganuma
Erika Hirai
High Standard
Fukuzawa Yuma
Erika Hirai
High Standard
Fukuzawa Yuma
Application Number:
JP2015140145A
Publication Date:
October 02, 2019
Filing Date:
July 14, 2015
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L41/047; B41J2/14; B41J2/16; H01L41/09
Domestic Patent References:
| JP2008284781A | ||||
| JP2014034114A | ||||
| JP2014117925A | ||||
| JP2008229985A |
Attorney, Agent or Firm:
Teruho Tsukui