Title:
パターン描画装置
Document Type and Number:
Japanese Patent JP6583451
Kind Code:
B2
Inventors:
Masaki Kato
Shuichi Nakayama
Shuichi Nakayama
Application Number:
JP2018036163A
Publication Date:
October 02, 2019
Filing Date:
March 01, 2018
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/24; G03F7/20
Domestic Patent References:
| JP2017067823A | ||||
| JP1237513A | ||||
| JP2015145990A | ||||
| JP2003053576A | ||||
| JP2000263271A | ||||
| JP2003048093A | ||||
| JP2015210437A |
Attorney, Agent or Firm:
Takehiro Chiba
Toshiyuki Miyadera
Takayuki Chima
Shuji Ouchi
Yasuharu Nakasone
Shiro Sakai
Toru Sekiguchi
Toshiyuki Miyadera
Takayuki Chima
Shuji Ouchi
Yasuharu Nakasone
Shiro Sakai
Toru Sekiguchi