Title:
基板支持部材
Document Type and Number:
Japanese Patent JP6588367
Kind Code:
B2
Inventors:
Hisanori Aoyama
Ken Fukasawa
Ken Fukasawa
Application Number:
JP2016057191A
Publication Date:
October 09, 2019
Filing Date:
March 22, 2016
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/683
Domestic Patent References:
| JP2014524664A | ||||
| JP2008085129A | ||||
| JP2001185607A |
Attorney, Agent or Firm:
Creation International Patent Office