Title:
振動体センサによって蒸気の濃度を決定するための装置および方法
Document Type and Number:
Japanese Patent JP6595493
Kind Code:
B2
Abstract:
A device and a method determines the concentration of a vapor in a volume, in particular for determining or controlling the mass flow of the vapor being conveyed through the volume by a carrier gas. The device comprises a sensor, which supplies a sensor signal that is dependent on the concentration or partial pressure of the vapor. The sensor has an oscillatory body that can be brought to oscillation, the oscillation frequency of which is influenced by a mass accumulation formed on a surface of the oscillating body by the condensed vapor. The oscillating body has a temperature control unit, by means of which the oscillating body can be brought to a temperature below the condensation temperature of the vapor. An evaluation unit determines the concentration or the partial pressure of the vapor from the temporal change of the oscillator frequency.
Inventors:
Becardo, Birgitorum Guard
Cremel, Claudia
Trim bones, curls-Heinz
Long, michael
Eichler, Andy
Al Ahmad, Nael
Cremel, Claudia
Trim bones, curls-Heinz
Long, michael
Eichler, Andy
Al Ahmad, Nael
Application Number:
JP2016554284A
Publication Date:
October 23, 2019
Filing Date:
February 23, 2015
Export Citation:
Assignee:
Ixtron, S.E.
International Classes:
G01N5/02; B05B12/00; G01F1/00
Domestic Patent References:
| JP4974858B2 | ||||
| JP5190446B2 | ||||
| JP5242347B2 | ||||
| JP4818073B2 |
Foreign References:
| US20060179918 | ||||
| US5289715 |
Attorney, Agent or Firm:
Takashiro Kojima
Noriko Kawai
Toshihiro Minami
Noriko Kawai
Toshihiro Minami