Title:
試料保持具
Document Type and Number:
Japanese Patent JP6603153
Kind Code:
B2
Inventors:
Yohei Hori
Application Number:
JP2016031938A
Publication Date:
November 06, 2019
Filing Date:
February 23, 2016
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP2006013302A | ||||
| JP2015118965A |