Title:
レジストパターン形成装置およびレジストパターン形成方法
Document Type and Number:
Japanese Patent JP6605876
Kind Code:
B2
Inventors:
Hiroshi Hosoda
Yoshihiro Inao
Akihiko Sato
Konishi Kiyotaka
Yoshihiro Inao
Akihiko Sato
Konishi Kiyotaka
Application Number:
JP2015158946A
Publication Date:
November 13, 2019
Filing Date:
August 11, 2015
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
H01L21/027; G03F7/20; G03F7/30
Domestic Patent References:
| JP2013114238A | ||||
| JP2008164789A | ||||
| JP2013110194A | ||||
| JP2008166316A | ||||
| JP2011091374A | ||||
| JP2015064516A | ||||
| JP10256118A | ||||
| JP2013206858A | ||||
| JP2004319559A |
Foreign References:
| US20110304053 | ||||
| WO2015002183A1 | ||||
| US20030003407 | ||||
| WO2013015157A1 |
Attorney, Agent or Firm:
Sumio Tanai
Matsumoto
Ryu Miyamoto
Masato Iida
Matsumoto
Ryu Miyamoto
Masato Iida