Title:
熱伝導率測定装置、熱伝導率測定方法、及び真空度評価装置
Document Type and Number:
Japanese Patent JP6634546
Kind Code:
B2
Inventors:
Toshikazu Hasegawa
Yoshihiro Goto
Isamu Chiba
Yoshihiro Goto
Isamu Chiba
Application Number:
JP2015143273A
Publication Date:
January 22, 2020
Filing Date:
July 17, 2015
Export Citation:
Assignee:
Hidehiro Seiki Co., Ltd.
International Classes:
G01N25/18
Domestic Patent References:
| JP2002131257A | ||||
| JP2010143602A | ||||
| JP2006125527A | ||||
| JP59178348A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito