Title:
検査装置及び検査方法
Document Type and Number:
Japanese Patent JP6638215
Kind Code:
B2
Inventors:
Takao Kumada
Application Number:
JP2015099138A
Publication Date:
January 29, 2020
Filing Date:
May 14, 2015
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
G01N25/72; G01J5/48
Domestic Patent References:
| JP63063959A | ||||
| JP2003185608A | ||||
| JP2003014675A | ||||
| JP63193052A | ||||
| JP5296956A | ||||
| JP2001311709A | ||||
| JP9061388A | ||||
| JP62098243A | ||||
| JP201549194A | ||||
| JP201661602A |
Foreign References:
| US6019504 | ||||
| WO2014199869A1 |
Attorney, Agent or Firm:
Shinji Hayami