Title:
単結晶の製造方法および装置
Document Type and Number:
Japanese Patent JP6642234
Kind Code:
B2
More Like This:
Inventors:
Toshiyuki Sato
Application Number:
JP2016084199A
Publication Date:
February 05, 2020
Filing Date:
April 20, 2016
Export Citation:
Assignee:
Sumco inc.
International Classes:
C30B13/30
Domestic Patent References:
JP6057630B2 | ||||
JP11278981A | ||||
JP2014240338A | ||||
JP52033042B1 | ||||
JP2013249220A | ||||
JP7206573A | ||||
JP4097979A |
Foreign References:
WO2002010486A1 |
Attorney, Agent or Firm:
Mitsuhiro Washito
Ogata Japanese
Yasuyuki Kurose
Ogata Japanese
Yasuyuki Kurose