Title:
基板保持装置及びその製造方法
Document Type and Number:
Japanese Patent JP6650345
Kind Code:
B2
Abstract:
A substrate holding device includes a base body that has a flat plate-like shape and that includes gas passages that open in an upper surface of the base body, and a plurality of protrusions that protrude from the upper surface of the base body. At least an upper part of each of the protrusions has a conical frustum shape having a base angle of 70° or more and 85° or less.
Inventors:
Atsushi Iwabuchi
Shinya Kikuchi
Shinya Kikuchi
Application Number:
JP2016105587A
Publication Date:
February 19, 2020
Filing Date:
May 26, 2016
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/683
Domestic Patent References:
| JP2004221323A | ||||
| JP2010123843A | ||||
| JP10242255A | ||||
| JP2007266611A | ||||
| JP8139169A |
Attorney, Agent or Firm:
Creation International Patent Office