Title:
合成石英ガラス基板の製造方法
Document Type and Number:
Japanese Patent JP6669286
Kind Code:
B2
Abstract:
A synthetic quartz glass substrate is prepared by furnishing a synthetic quartz glass block, coating an arbitrary surface and an opposite surface of the block with a liquid having a transmittance of at least 99.0%/mm at the wavelength of birefringence measurement, measuring the birefringence of the block by letting light enter one coated surface and exit the other coated surface, and sorting the block to an acceptable or unacceptable group, based on the measured birefringence value.
Inventors:
Daimi Harada
Kazuo Shirota
Hisashi Yagi
Masaki Takeuchi
Kazuo Shirota
Hisashi Yagi
Masaki Takeuchi
Application Number:
JP2019014100A
Publication Date:
March 18, 2020
Filing Date:
January 30, 2019
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C03B20/00; G01N21/23; G03F1/60
Domestic Patent References:
| JP2013140237A | ||||
| JP4688150B2 | ||||
| JP8075652A | ||||
| JP63154947A | ||||
| JP2004145309A | ||||
| JP201232786A |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Katsuhiko Masaki
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Katsuhiko Masaki