Title:
レーザ光を高速で走査可能なガルバノスキャナを含む光造形加工機
Document Type and Number:
Japanese Patent JP6673632
Kind Code:
B2
Abstract:
A processing system including a laser beam source which generates a laser beam, a galvano scanner which includes a mirror for reflecting the laser beam and a servo motor for rotating the mirror and which emits the laser beam to a workpiece, and an operation control device which controls the operation of the servo motor in accordance with a sinusoidal drive command.
Inventors:
Naoto Sonoda
Yukio Toyosawa
Yukio Toyosawa
Application Number:
JP2014182633A
Publication Date:
March 25, 2020
Filing Date:
September 08, 2014
Export Citation:
Assignee:
FANUC Corporation
International Classes:
B23K26/082; B22F3/105; B22F3/16; B23K26/00; G02B26/10
Domestic Patent References:
| JP2012200745A | ||||
| JP54118854A | ||||
| JP3175502A | ||||
| JP3372262B2 | ||||
| JP2757269B2 |
Attorney, Agent or Firm:
Atsushi Aoki
Shinji Mitsuhashi
Hirose Shigeki
Shinji Mitsuhashi
Hirose Shigeki