Title:
荷電粒子線装置、及び荷電粒子線装置用制振ダンパ
Document Type and Number:
Japanese Patent JP6676407
Kind Code:
B2
Abstract:
There is proposed a column supporting structure that includes a viscoelastic sheet, a supporting plate which holds the viscoelastic sheet, and a fixation portion which connects the supporting plate to each lens barrel. The viscoelastic sheet is disposed to extend in a plane perpendicular to one lens barrel or the other lens barrel.
Inventors:
Takahashi Sodai
Yoshimasa Fukushima
Katsunori Konuki
Tetsuya Shinbori
Yoshimasa Fukushima
Katsunori Konuki
Tetsuya Shinbori
Application Number:
JP2016035027A
Publication Date:
April 08, 2020
Filing Date:
February 26, 2016
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01J37/16; F16F7/00; F16F15/04
Domestic Patent References:
| JP2016018621A |
Foreign References:
| US20120193550 | ||||
| WO2011043391A1 | ||||
| WO1999027570A1 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation