Title:
薄膜キャパシタ
Document Type and Number:
Japanese Patent JP6690154
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a thin film capacitor capable of reducing the displacement amount at the time of voltage application.SOLUTION: A thin film capacitor includes a first electrode layer 11, a dielectric layer 12 provided on the first electrode layer 11, and a second electrode layer 13 provided on the dielectric layer 12. The second electrode layer 13 includes at least one conductive layer containing any one of metals selected from a group consisting of Ni, Cu and Al, as a main component. The conductive layer further contains at least one kind of addition atom selected from atoms belonging to second through fourth periodic tables (excluding Ne, Ar and Kr), and the content of each addition atom is 1-1000 mass ppm.SELECTED DRAWING: Figure 1
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Inventors:
Yuuki Yukawa
High Saki Kanshi
Hitoshi Saida
High Saki Kanshi
Hitoshi Saida
Application Number:
JP2015172921A
Publication Date:
April 28, 2020
Filing Date:
September 02, 2015
Export Citation:
Assignee:
tdk Corporation
International Classes:
H01G4/30; H01G4/33
Domestic Patent References:
| JP2007194592A | ||||
| JP2013062531A | ||||
| JP2014007239A | ||||
| JP2003213407A | ||||
| JP2015045084A | ||||
| JP57088716A | ||||
| JP2012525716A | ||||
| JP2001342560A | ||||
| JP2007294937A |
Foreign References:
| WO2009122774A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Takashi Mikami
Yoshiki Kuroki
Takashi Mikami