Title:
移載装置および判定方法
Document Type and Number:
Japanese Patent JP6692777
Kind Code:
B2
Abstract:
According to one embodiment, transfer equipment includes: a first negative-pressure generation source; a plurality of first vacuum suction parts; a sensor part; and a first determination circuit. The sensor part configured to acquire a plurality of measured values corresponding to the negative pressure of each of the first vacuum suction parts. The first determination circuit configured to set a first threshold value based on the measured values and determine a vacuum suction state of the first vacuum suction parts corresponding to the measured valued based on the first threshold value and the measured values.
Inventors:
Junya Tanaka
Akito Ogawa
Takashi Sonoura
Haruna Eto
Akito Ogawa
Takashi Sonoura
Haruna Eto
Application Number:
JP2017143390A
Publication Date:
May 13, 2020
Filing Date:
July 25, 2017
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
B65G47/91; B65G59/04
Domestic Patent References:
| JP2013154457A | ||||
| JP2007281073A | ||||
| JP2017019100A |
Attorney, Agent or Firm:
Kurata Masatoshi
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken