Title:
溶解酸素センサの構成要素の寿命の終了の検出及び信号生成のためのシステムおよび方法
Document Type and Number:
Japanese Patent JP6716463
Kind Code:
B2
Abstract:
Embodiments as disclosed herein may include a sensor including a luminophor exposed to a fluid flow path. The luminophor may emit light in response to illumination by an excitation light source. The magnitude of light emitted by the luminophor in response to illumination may be determined. It can be determined if this magnitude is within a threshold of the baseline magnitude and an alarm state set based on this determination. This alarm state may indicate that the luminophor has reached an end-of-life state or otherwise should be replaced.
Inventors:
Francisco Javier Macchuca
Ronald Philip Charero
Kyle William Montgomery
Ronald Philip Charero
Kyle William Montgomery
Application Number:
JP2016558133A
Publication Date:
July 01, 2020
Filing Date:
March 19, 2015
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
G01N21/64
Domestic Patent References:
| JP2010535331A | ||||
| JP2003004635A | ||||
| JP10132742A | ||||
| JP2010506173A | ||||
| JP2005195354A |
Foreign References:
| US20100143675 | ||||
| US20110293480 | ||||
| US6051437 | ||||
| US20100203649 | ||||
| WO2009016236A1 | ||||
| EP2020597A1 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda