Title:
エキスパンドシート
Document Type and Number:
Japanese Patent JP6723643
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an expanded sheet capable of being properly adhered to an annular frame.SOLUTION: An expanded sheet (1) expanded while a plate-like workpiece (11) is bonded thereon has a first bonded region (A1) where a workpiece is bonded, and a second bonded region (A2) where an annular frame (21) is bonded, the second bonded region surrounding the first bonded region. The adhesive force of the second bonded region is stronger than that of the first bonded region.SELECTED DRAWING: Figure 1
Inventors:
Shun Mori
Yukiko Kikawa
Yukiko Kikawa
Application Number:
JP2016098226A
Publication Date:
July 15, 2020
Filing Date:
May 16, 2016
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; H01L21/683
Domestic Patent References:
| JP2006229021A | ||||
| JP2011137057A | ||||
| JP2009147201A | ||||
| JP2012039025A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto