Title:
水平設置装置及び被設置物の水平設置方法
Document Type and Number:
Japanese Patent JP6724622
Kind Code:
B2
Abstract:
An object of the invention is to reduce the labor time required to place an object horizontally on a support surface. A horizontal placement device 8, the purpose of which is to place a target object D1 horizontally on a support surface by adjusting a plurality of height adjustment mechanisms 31 provided below the object, includes: level measuring instruments 41 disposed at each of a plurality of measurement locations of the target object D1, a calculation section 91 which, based on the measured values for each of the level measuring instruments 41 and an appropriate range of levelness, calculates an amount of adjustment for at least one height adjustment mechanism 31 which enables the measured value of a level measuring instrument 41 which is outside the appropriate range of levelness to be brought within the appropriate range of levelness, and a countermeasure section 81 which, based on the calculated amount of adjustment, applies appropriate countermeasures to enable the object to be placed horizontally on the support surface. By using this process, the burden on workers is alleviated, and labor time can be reduced.
Inventors:
Sonoda main tax
Akada Hikaru
Kazuhisa Hasebe
Yoshinori Utsunomiya
Akada Hikaru
Kazuhisa Hasebe
Yoshinori Utsunomiya
Application Number:
JP2016142587A
Publication Date:
July 15, 2020
Filing Date:
July 20, 2016
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; G03F7/20; H01L21/683
Domestic Patent References:
| JP2012220444A | ||||
| JP2006125948A | ||||
| JP8320729A | ||||
| JP2004309447A | ||||
| JP10050575A | ||||
| JP11226846A | ||||
| JP2011140098A |
Foreign References:
| US20040083616 |
Attorney, Agent or Firm:
Patent Corporation Yayoi Patent Office
Toshio Inoue
Tomoaki Miida
Toshio Inoue
Tomoaki Miida