Title:
金属皮膜の成膜装置
Document Type and Number:
Japanese Patent JP6740951
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a film deposition apparatus of a metallic film that can prevent a solid electrolyte membrane from getting caught by a chamber and can avoid a metallic solution in the chamber from spilling out of the chamber.SOLUTION: A solid electrolyte membrane 13 of a film deposition apparatus 1 is arranged so as to cover an opening 15a of a chamber 15 and to seal a housing space G. The chamber 15 comprises: a first sealing material 41 for sealing the opening 15a; a second sealing material 42 for surrounding the outer part of the chamber; and a drainage port 15d formed between the first sealing material 41 and the second sealing material 42. The film deposition apparatus 1 further comprises a sending-out roller 31A for sending out the solid electrolyte membrane 13 and a winding-up roller 31B in a state that a metallic solution L is supplied to the housing space G by a feed pump.SELECTED DRAWING: Figure 1
Inventors:
Yuichi Ito
Application Number:
JP2017073837A
Publication Date:
August 19, 2020
Filing Date:
April 03, 2017
Export Citation:
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
C25D17/00; C25D21/00
Domestic Patent References:
| JP2014051701A | ||||
| JP2005042158A | ||||
| JP2014031533A | ||||
| JP2002317300A | ||||
| JP2007169773A | ||||
| JP2009179821A | ||||
| JP2005281753A | ||||
| JP2004176116A |
Foreign References:
| US20100032304 |
Attorney, Agent or Firm:
Hiraki International Patent Office