Title:
触媒基準装置
Document Type and Number:
Japanese Patent JP6757011
Kind Code:
B2
Abstract:
Provided is a catalyst reference device which is capable of preventing damage to a catalyst layer when planarizing a surface of a workpiece by catalyst referred etching using a catalyst body that has a catalyst layer. A catalyst referred etching device 200 includes: a catalyst body 240 that has a catalyst layer for removing only a portion of a surface of a workpiece that abuts or approaches the catalyst body 240 by reaction of a catalyst reference; and a processing performing unit that performs a surface forming operation that is required for removal by reaction of the catalyst reference after the surface of the workpiece is made to abut against or brought near the surface of the catalyst body 240 such that a catalyst film does not peel off.
Inventors:
Eisuke Suzuki
Suzuki Tatsutoshi
Daisuke Suzuki
Suzuki Tatsutoshi
Daisuke Suzuki
Application Number:
JP2019555055A
Publication Date:
September 16, 2020
Filing Date:
August 01, 2019
Export Citation:
Assignee:
Toho Engineering Co., Ltd.
International Classes:
H01L21/306
Domestic Patent References:
| JP2017159430A | ||||
| JP2003297804A | ||||
| JP2011129596A |
Foreign References:
| WO2015159973A1 |
Attorney, Agent or Firm:
Ryota Kato
Tetsuo Shiba
Tetsuo Shiba