クロマティック共焦点センサ及び測定方法

Title:

クロマティック共焦点センサ及び測定方法

Document Type and Number:

Japanese Patent JP6767753

Kind Code:

B2

Abstract:

The invention relates to a color confocal sensor and a measuring method. The color confocal sensor comprises a light source portion used for emitting a plurality of light beams of different wave lengths; an optical head including an objective lens allowing the plurality of light beams to be converged at different focusing locations, and used for selecting light among the plurality of light beams reflected by the measured objects at the focusing locations as measuring light; an optical splitter comprising diffraction gratings used for dividing selected measuring light into a plurality of diffraction light beams, and a sensor used for receiving two or more diffraction light beams from the plurality of diffraction light beams; and a signal processing control portion used for calculating the position of a measured object according to the difference between the light receiving positions of two or more diffraction light beams received by the sensor.

Inventors:

Koji Kubo

Application Number:

JP2016035124A

Publication Date:

October 14, 2020

Filing Date:

February 26, 2016

Export Citation:

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