Title:
レーザ式ガス分析計
Document Type and Number:
Japanese Patent JP6777116
Kind Code:
B2
Abstract:
A laser gas analyzer (100) includes an optical emitter (11) that irradiates laser light onto a measurement target gas, a reflector (28) that reflects laser light (11a) that passed through the measurement target gas, an optical receiver (13) that receives the laser light (11a) reflected by the reflector (28), a controller (15) that controls the optical emitter (11) and processes output signals from the optical receiver, a measurement target gas passage (22) including openings (22a, 22b) into and out of which the measurement target gas flows, a purge region (24) filled with a purge gas not including a component to be measured, and a separation wall (26) including a hole (26a) through which the laser light (11a) can pass. A surface of the separation wall (26) facing the optical emitter (11) has a minute unevenness formed thereon to promote diffusion of the laser light (11a) or has been surface treated to promote diffusion or absorption of the laser light (11a). This laser gas analyzer (100) measures component concentration with better accuracy.
Inventors:
Yuno Umino
Junichi Matsuo
Junichi Matsuo
Application Number:
JP2018092398A
Publication Date:
October 28, 2020
Filing Date:
May 11, 2018
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G01N21/3504; G01N21/01
Domestic Patent References:
| JP62184458U | ||||
| JP2013245951A | ||||
| JP2012053037A |
Foreign References:
| US20140291526 |
Attorney, Agent or Firm:
Kenji Sugimura
Mitsutsugu Sugimura
Tatsuya Tanaka
Kiyoshi Shinno
Mitsutsugu Sugimura
Tatsuya Tanaka
Kiyoshi Shinno