Title:
次世代先進プラズマ技術のためのチャンバ本体設計アーキテクチャ
Document Type and Number:
Japanese Patent JP6778686
Kind Code:
B2
Abstract:
An apparatus for processing a substrate is disclosed and includes, in one embodiment, a twin chamber housing having two openings formed therethrough, a first pump interface member coaxially aligned with one of the two openings formed in the twin chamber housing, and a second pump interface member coaxially aligned with another of the two openings formed in the twin chamber housing, wherein each of the pump interface members include three channels that are concentric with a centerline of the two openings.
Inventors:
Andrew, Nguyen
Howard, Bradley J.
Bright, Nicholas J.
Howard, Bradley J.
Bright, Nicholas J.
Application Number:
JP2017539275A
Publication Date:
November 04, 2020
Filing Date:
January 14, 2016
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/3065
Domestic Patent References:
| JP2011529136A | ||||
| JP2013084602A | ||||
| JP2013530516A | ||||
| JP2011511474A |
Foreign References:
| US20030176074 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation
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