Title:
研削装置
Document Type and Number:
Japanese Patent JP6792363
Kind Code:
B2
Abstract:
A grinding apparatus includes a holding unit including a holding table having a holder for holding a workpiece and a grinding water suction part for drawing in grinding water outside of the holder, a rotational shaft having an end fixed centrally to a bottom surface of the holding table, a tubular rotary joint surrounding the rotational shaft, and a motor rotating the rotational shaft about its own axis. The rotational shaft has a first suction channel held in fluid communication with the holder of the holding table and a second suction channel held in fluid communication with the grinding water suction part. The rotary joint has a communication channel by which the first suction channel and the second suction channel are held in fluid communication with at least a suction source.
Inventors:
Hiroki Miyamoto
Application Number:
JP2016144144A
Publication Date:
November 25, 2020
Filing Date:
July 22, 2016
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B7/04; B24B41/06; B24B55/02; H01L21/304
Domestic Patent References:
| JP10303152A | ||||
| JP11254298A | ||||
| JP2001287141A | ||||
| JP2007260850A |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office