Title:
静電チャック装置および静電チャック装置の製造方法
Document Type and Number:
Japanese Patent JP6798640
Kind Code:
B2
Abstract:
The electrostatic chuck device includes: a base having one main surface serving as a mounting surface on which a plate-shaped sample is mounted; and an electrode for electrostatic attraction provided on a side opposite to the mounting surface in the base or in an interior of the base, in which the electrode for electrostatic attraction is made of a composite sintered body that includes a matrix phase having insulation properties and a dispersed phase having a lower volume resistivity value than the matrix phase, in any cross section of the composite sintered body, a region of the dispersed phase, which is surrounded by the matrix phase and is independent, includes aggregated portions having a maximum Feret diameter of 30 μm or more, and one or more of the aggregated portions are present in a range of 2500 μm2 in any cross section of the sintered body.
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Inventors:
Kunimoto
Morishita Norito
Morishita Norito
Application Number:
JP2020507922A
Publication Date:
December 09, 2020
Filing Date:
March 22, 2019
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
International Classes:
H01L21/683; H01L21/3065
Domestic Patent References:
| JP2014063985A | ||||
| JP2014063986A | ||||
| JP2008098626A | ||||
| JP2001354473A | ||||
| JP2008087986A | ||||
| JP2017183467A |
Attorney, Agent or Firm:
Nishizawa Kazumi
Akio Sato
Hagiwara Ayatsu
Akio Sato
Hagiwara Ayatsu