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Title:
マイクロ流体光イオン化検出器
Document Type and Number:
Japanese Patent JP6799546
Kind Code:
B2
Abstract:
A rapid flow-through, highly sensitive microfluidic photoionization detector (PID) which is micro-fabricated directly onto a substrate, such as a conductive silicon wafer, is provided. The microfluidic PID has an ionization chamber volume of less than 9 µL. The microfluidic PID may have a flow through design with a microfluidic channel defines a serpentine pattern on the substrate. The flow through design of the microfluidic PID results in negligible dead volume, thus allowing a shortened response time over existing commercially available designs. Such microfluidic PIDs are particularly useful with gas chromatography (GC), including microGC and multidimensional microGC systems. Methods for calibrating PIDs are also provided.

Inventors:
Fan, sudon
Chu, Hombo
Nydez, Robert
Krabay palm, bonito
Butterfly, Menryan
Lee, Ji Won
Application Number:
JP2017557966A
Publication Date:
December 16, 2020
Filing Date:
May 04, 2016
Export Citation:
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Assignee:
THE REGENTS OF THE UNIVERSITY OF MICHIGAN
International Classes:
G01N27/64
Domestic Patent References:
JP2003515105A
JP2014529746A
JP2000266270A
JP2012118063A
JP2011122855A
JP63158454A
JP8160027A
Foreign References:
US5855850
US6313638
US6225633
Attorney, Agent or Firm:
Asamura patent office