Title:
基板搬送装置、露光装置、フラットパネルディスプレイの製造方法、デバイス製造方法、基板搬送方法、及び露光方法
Document Type and Number:
Japanese Patent JP6813098
Kind Code:
B2
Abstract:
In order to shorten the time required for substrate replacement, this substrate handling device which conveys a substrate to a holding device comprises: a first holding portion which holds the substrate above the holding device; a second holding portion which holds part of the substrate held by the first holding portion; and a drive unit which moves the holding device and one of the second holding portion and the first holding portion relative to one another in such a manner that the first holding portion retracts from above the holding device. The substrate is held during the relative movement of the holding device, first holding portion and second holding portion caused by the drive unit.
Inventors:
Yasuo Aoki
Application Number:
JP2019544180A
Publication Date:
January 13, 2021
Filing Date:
September 29, 2017
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01L21/677
Domestic Patent References:
| JP2012256027A | ||||
| JP2012060134A | ||||
| JP2010123888A | ||||
| JP2011102410A1 | ||||
| JP2008091542A | ||||
| JP2007238266A | ||||
| JP2006266722A |
Foreign References:
| WO2016159062A1 |
Attorney, Agent or Firm:
Shuhei Katayama