Title:
圧力センサ
Document Type and Number:
Japanese Patent JP6815900
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To detect pressure fluctuations with high accuracy.SOLUTION: A pressure sensor 1 comprises: a hollow sensor body 2 having a cavity 10 formed inside and including a continuous hole communicating the inside and outside of the cavity 10; a cantilever 3 in tabular form extending in one direction from a base end toward a tip so as to close up an opening face of the cavity 10 except the continuous hole and flexurally deformed in accordance with a pressure difference between the inside and outside of the cavity 10; a cantilever 4 supported in a cantilever state on the outside of the cavity 10 and flexurally deformed in accordance with the flow of a fluid on the outside of the cavity 10; and a pressure detection unit for detecting the pressure fluctuation of the fluid on the basis of a resistance change of the cantilever 3 that corresponds to the flexural deformation of the cantilever 3 and a resistance change of the cantilever 4 that corresponds to the flexural deformation of the cantilever 4.SELECTED DRAWING: Figure 2
Inventors:
Ayako Nobe
Masayuki Suda
Hiroshi Takahashi
Ocean studies
Takeshi Uchiyama
Yoko Shinohara
Masayuki Suda
Hiroshi Takahashi
Ocean studies
Takeshi Uchiyama
Yoko Shinohara
Application Number:
JP2017039487A
Publication Date:
January 20, 2021
Filing Date:
March 02, 2017
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01L9/00
Domestic Patent References:
| JP2013185971A | ||||
| JP2014142330A | ||||
| JP60030554U | ||||
| JP2014142323A |
Foreign References:
| US20150276529 |
Attorney, Agent or Firm:
Field Saki Satoshi
Shingo Suzuki
Nishizawa Kazumi
Masatake Shiga
Shingo Suzuki
Nishizawa Kazumi
Masatake Shiga