Title:
球面収差補正算出装置、顕微鏡、球面収差補正算出プログラム及び球面収差補正算出方法
Document Type and Number:
Japanese Patent JP6822483
Kind Code:
B2
Abstract:
[Solution] An image group generating device comprises: an objective lens including a spherical aberration correction optical system; a stage whereon an object to be captured is placed; and an image group generating unit for generating an image group that includes a first image group acquired by continuously capturing the object to be captured while changing a relative distance between the objective lens and the stage with the spherical aberration correction optical system adjusted with a first aberration correction amount, and a second image group acquired by continuously capturing the object to be captured while changing the relative distance between the objective lens and the stage with the spherical aberration correction optical system adjusted with a second aberration correction amount.
Inventors:
Ichiro Sase
Takashi Nakagawa
Takashi Nakagawa
Application Number:
JP2018549664A
Publication Date:
January 27, 2021
Filing Date:
November 08, 2016
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B21/00; G02B21/36
Domestic Patent References:
| JP2016114795A | ||||
| JP2016114796A | ||||
| JP2016114797A | ||||
| JP2014160213A |
Attorney, Agent or Firm:
Nishizawa Kazumi
Kazunori Onami
Junichi Kobayashi
Kazunori Onami
Junichi Kobayashi