Title:
光照射装置および光照射方法
Document Type and Number:
Japanese Patent JP6828493
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To hermetically seal a processing space by a seal member while uniformly forming a gap between a window member and a stage.SOLUTION: A light-irradiation device 100 comprises: a light source part 10 for irradiating with light through a window member 12; a stage 21 opposed to the window member 12 and arranged to put an object to be processed (work W) on; a support member (window frame member 16) for supporting the window member 12 at its peripheral edge; and a seal member 17 for hermetically sealing a processing space between the window member 12 and the stage 21, where the work put on the stage 21 is processed by light. The seal member 17 is an expandable seal formed to be hollow in section, which is expanded in section when a fluid flows into the hollow space, and which is disposed between the support member (window frame member 16) and an outer peripheral side face of the stage 21. When expanded in a second direction perpendicular to a first direction in which the window member 12 is opposed to the stage 21, the seal member presses the outer peripheral side face of the stage 21, thereby hermetically sealing the processing space.SELECTED DRAWING: Figure 1
Inventors:
Kentaro Nomoto
Kikuiri
Kikuiri
Application Number:
JP2017026246A
Publication Date:
February 10, 2021
Filing Date:
February 15, 2017
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01L21/3065; H01L21/304
Domestic Patent References:
| JP2015111611A | ||||
| JP2015126162A | ||||
| JP2016072375A | ||||
| JP2016084983A | ||||
| JP2009260138A |
Attorney, Agent or Firm:
Megumi Konishi
Shigeyuki Nagaoka
Shigeyuki Nagaoka