Title:
エンコーダ装置、駆動装置、ステージ装置、及びロボット装置
Document Type and Number:
Japanese Patent JP6834288
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an encoder device that can reduce the frequency of maintenance.SOLUTION: An encoder device comprises: a position detection module including a detection part that detects information on the position of a moving part, and a processing substrate part that processes a result of detection performed by the detection part; a battery module including a battery that supplies power to the processing substrate part; and a connection part that, when the position detection module and battery module are fixed to each other, electrically connects a first terminal of the position detection module and a second terminal of the battery module.SELECTED DRAWING: Figure 1
Inventors:
Masahiko Goto
Yuichi Mitsuhashi
Yuichi Mitsuhashi
Application Number:
JP2016184279A
Publication Date:
February 24, 2021
Filing Date:
September 21, 2016
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01D5/245; B25J19/02; G01D5/244
Domestic Patent References:
| JP63271115A | ||||
| JP2001202941A | ||||
| JP10225252A | ||||
| JP11211505A |
Foreign References:
| US20100078468 | ||||
| WO2016010141A1 |
Attorney, Agent or Firm:
Kazuya Nishi
Takeshi Kawamura
Takeshi Kawamura