Title:
ガスセンサ
Document Type and Number:
Japanese Patent JP6834358
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a gas sensor capable of enlarging a film thickness of a heater and stable in detection accuracy of a gas.SOLUTION: A gas sensor includes: a first insulating film 31; a thermistor film 40 formed on the first insulating film 31; detection electrodes 41, 42 formed on the thermistor film 40; a second insulating film 32 covering the thermistor film 40 and the detection electrodes 41, 42; and a heater 50 formed on the second insulating film 32. The detection electrodes 41, 42 and the first insulating films 31 are separated by the thermistor film 40. According to the present invention, even if a film thickness of the heater 50 is enlarged, the patterning of the thermistor film 40 and the detection electrodes 41, 42 is not affected. Moreover, since the detection electrodes 41, 42 and the first insulating film 31 are separated by the thermistor film 40, there is no need to form an adhesion layer on the substrates of the detection electrodes 41, 42, and there is no dispersion of the metal that constitutes the adhesion layer to the thermistor film 40.SELECTED DRAWING: Figure 1
Inventors:
Tetsuo Hata
Hiroshi Matsuo
Junya Fukuda
Hiroshi Matsuo
Junya Fukuda
Application Number:
JP2016214353A
Publication Date:
February 24, 2021
Filing Date:
November 01, 2016
Export Citation:
Assignee:
tdk Corporation
International Classes:
G01N27/18; G01N27/16
Domestic Patent References:
| JP2016156623A | ||||
| JP2015034760A | ||||
| JP2011232295A | ||||
| JP2012013603A | ||||
| JP2001165739A |
Attorney, Agent or Firm:
Mitsuhiro Washito
Ogata Japanese
Yasuyuki Kurose
Ogata Japanese
Yasuyuki Kurose