Title:
ロールツーロール方式の表面処理装置並びにこれを用いた成膜方法及び成膜装置
Document Type and Number:
Japanese Patent JP6842031
Kind Code:
B2
Abstract:
Disclosed herein is a roll-to-roll long base material surface processing device capable of performing surface processing on a long base material with little occurrence of wrinkling in the long base material at low costs.The surface processing device includes: two can rolls that cool a long resin film transferred in a roll-to-roll manner in a vacuum chamber with a cooling medium circulated therein by wrapping the long resin film around outer circumferences thereof; and surface processing units typified by magnetron sputtering cathodes provided so as to face the outer circumferences of the two can rolls, wherein a second can roll of the two can rolls other than a most upstream first can roll has a gas release mechanism that releases a gas from the outer circumference.
Inventors:
Hideharu Ogami
Application Number:
JP2016162787A
Publication Date:
March 17, 2021
Filing Date:
August 23, 2016
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
C23C14/56; H05K3/00; H05K3/16
Domestic Patent References:
| JP2012026025A | ||||
| JP2015209552A | ||||
| JP2014234541A | ||||
| JP2009224444A |
Attorney, Agent or Firm:
Noriyuki Tsujikawa