Title:
プローブシステム及びその利用方法
Document Type and Number:
Japanese Patent JP6852151
Kind Code:
B2
Abstract:
Probe systems and methods are disclosed herein. The methods include directly measuring a distance between a first manipulated assembly and a second manipulated assembly, contacting first and second probes with first and second contact locations, providing a test signal to an electrical structure, and receiving a resultant signal from the electrical structure. The methods further include characterizing at least one of a probe system and the electrical structure based upon the distance. In one embodiment, the probe systems include a measurement device configured to directly measure a distance between a first manipulated assembly and a second manipulated assembly. In another embodiment, the probe systems include a probe head assembly including a platen, a manipulator operatively attached to the platen, a vector network analyzer (VNA) extender operatively attached to the manipulator, and a probe operatively attached to the VNA extender.
Inventors:
Gavin nail fisher
Thomas Liner Thearigen
Peter McCann
Rodney Jones
Coby El Duckworth
Thomas Liner Thearigen
Peter McCann
Rodney Jones
Coby El Duckworth
Application Number:
JP2019516656A
Publication Date:
March 31, 2021
Filing Date:
September 20, 2017
Export Citation:
Assignee:
Form Factor Beaverton, Inc.
International Classes:
G01R1/06; G01R1/067; G01R31/26; H01L21/66
Domestic Patent References:
| JP2004264039A | ||||
| JP2011501403A | ||||
| JP2012089680A | ||||
| JP2006258667A |
Foreign References:
| WO2010150756A1 | ||||
| US5506515 | ||||
| US20130002284 | ||||
| US20050193576 | ||||
| US20060212248 | ||||
| US20160184996 |
Attorney, Agent or Firm:
Kenji Sugimura