Title:
超音波装置
Document Type and Number:
Japanese Patent JP6861558
Kind Code:
B2
Abstract:
An ultrasonic device includes a substrate having an opening portion penetrating through the substrate in a thickness direction; a membrane formed on the substrate and having a movable film defining a top surface portion of the opening portion; a lower electrode formed on a front surface of the membrane at a side opposite the opening portion; a piezoelectric film formed on a front surface of the lower electrode at a side opposite the membrane; and an upper electrode formed on a front surface of the piezoelectric film at a side opposite the lower electrode, wherein the movable film of the membrane has a shape that is deflected so as to be convex toward the lower electrode, and wherein the lower electrode is an IrOx/Ir/Ti/Pt laminated film with which an IrOx film, an Ir film, a Ti film, and a Pt film are laminated in that order from the membrane.
Inventors:
Kinya Ashikaga
Application Number:
JP2017070626A
Publication Date:
April 21, 2021
Filing Date:
March 31, 2017
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
H01L41/04; B06B1/06; H01L41/047; H01L41/09; H01L41/113
Domestic Patent References:
| JP2016019012A | ||||
| JP2013080786A | ||||
| JP2005065017A | ||||
| JP6040035A | ||||
| JP2011228548A | ||||
| JP2016074188A |
Attorney, Agent or Firm:
Patent Business Corporation Ai Patent Office