Title:
蒸着マスクの製造方法、蒸着マスクを作製するために用いられる金属板およびその製造方法
Document Type and Number:
Japanese Patent JP6866320
Kind Code:
B2
Abstract:
There is provided a method of inspecting a metal plate used for manufacturing a deposition mask having a plurality of through-holes formed therein. The method comprises a composition analysis step of analyzing a composition of a first surface of the metal plate by using an X-ray photoelectron spectroscopy. The method further comprises a selection step of selecting the metal plate based on the result of the composition analysis step. In the composition analysis of the first surface of the metal plate by means of the X-ray photoelectron spectroscopy, an incident angle of an X-ray emitted to the metal plate on the first surface is 45 degrees, and an acceptance angle of photoelectrons discharged from the metal plate is 90 degrees. The selection step selects the metal plate which satisfies the condition (1) defined herein.
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Inventors:
Ike Nagachikao
Hiroaki Nakayama
Kazushige Ikeda
Chiaki Hatsuda
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Hiroaki Nakayama
Kazushige Ikeda
Chiaki Hatsuda
Ouchi poetry
Application Number:
JP2018010979A
Publication Date:
April 28, 2021
Filing Date:
January 25, 2018
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
C23C14/04; H01L51/50; H05B33/10
Domestic Patent References:
| JP2000256800A | ||||
| JP2009120919A | ||||
| JP201465928A | ||||
| JP2012111195A |
Other References:
當麻 肇,”バックグラウンド処理の実際”,Journal of Surface Analysis,2001,Vol.8,p.49-54
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Satoru Asakura
Yukihiro Hotta
Kazuo Okamura
Yukitaka Nakamura
Satoru Asakura
Yukihiro Hotta
Kazuo Okamura