Title:
検査方法および検査装置
Document Type and Number:
Japanese Patent JP6869815
Kind Code:
B2
Abstract:
An inspection region 201 of a sample 2 is scanned with light, an optical image formed of the scanning light is acquired according to progression of scanning with the light, a reference image as a reference for the acquired optical image is created according to progression of acquisition of the optical image, the acquired optical image is compared to the reference image for the optical image to detect first defects in the pattern according to progression of the acquisition of the optical image, second defects caused by an erroneous operation of an inspection system 1 are detected based on a distribution of differences between the acquired optical image and the reference image during progression of detection of the first defects, and an inspection is stopped when the second defects are detected.
Inventors:
Takafumi Inoue
Application Number:
JP2017111983A
Publication Date:
May 12, 2021
Filing Date:
June 06, 2017
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
G01N21/956; G01B11/30; G03F1/84; H01L21/66
Domestic Patent References:
| JP2010021511A | ||||
| JP2013120101A | ||||
| JP2008014768A | ||||
| JP2016145887A |
Foreign References:
| US6297879 |
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Takeshi Sekine
Akaoka Akira
Takeyuki Suzuki
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Takeshi Sekine
Akaoka Akira
Takeyuki Suzuki