Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP6880364
Kind Code:
B2
Abstract:
A substrate is transported to a coating processing unit. An annular region of one surface of the substrate is processed. The substrate is carried into an edge exposure unit. Positions of a peripheral edge of the substrate and an inner edge of the annular region are detected. A position deviation amount of a center of the substrate held by a spin chuck from a rotation center of the spin chuck is calculated. Based on schedule management information, a relationship between orientations of the substrate held by the spin chuck at the time of carrying of the substrate into the coating processing unit and the substrate held by the substrate rotation unit at the time of carrying of the substrate into the edge exposure unit is specified. Based on the relationship, a position deviation direction of the center of the substrate from the rotation center is determined.
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Inventors:
Yukihiko Inagaki
Application Number:
JP2015161329A
Publication Date:
June 02, 2021
Filing Date:
August 18, 2015
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/027; B05C11/08; H01L21/68; H01L21/683
Domestic Patent References:
| JP2014091105A | ||||
| JP2013077639A | ||||
| JP2005203440A | ||||
| JP2013143513A | ||||
| JP2014170828A |
Attorney, Agent or Firm:
Yoshito Fukushima