Title:
蒸着マスク、蒸着方法及び有機ＥＬ表示装置の製造方法
Document Type and Number:
Japanese Patent JP6892470
Kind Code:
B2
Abstract:
To provide a vapor deposition mask capable of suppressing heat conduction in the frame of the vapor deposition mask and reducing weight, and having resistance even to a strong stress especially applied in a portion of the frame.SOLUTION: A vapor deposition mask comprises: a mask body 10 having an opening pattern; and a frame 15 for connecting at least a part of a peripheral portion of the mask body. At least a part of the frame is formed into a rod-like lateral frame 15b by laminating a unit structure 150 having a sandwich structure obtained by bonding a face plate 152 on at least a part of a core part 151 including an air-space through a connection face plate 153.SELECTED DRAWING: Figure 1A
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Inventors:
Katsuhiko Kishimoto
Application Number:
JP2019042026A
Publication Date:
June 23, 2021
Filing Date:
March 07, 2019
Export Citation:
Assignee:
Sakai Display Products Co., Ltd.
International Classes:
C23C14/04; C23C14/12; H01L27/32; H01L51/50; H05B33/10
Domestic Patent References:
| JP4261840A | ||||
| JP7189417A | ||||
| JP2003336200A | ||||
| JP2003191359A | ||||
| JP63188129U | ||||
| JP2002340280A | ||||
| JP9001701A | ||||
| JP7088988A | ||||
| JP2010126573A |
Attorney, Agent or Firm:
Asahina Patent Office