Title:
液体流量計
Document Type and Number:
Japanese Patent JP6895925
Kind Code:
B2
Abstract:
To provide a liquid flow meter capable of discharging generated bubbles and flowing a chemical liquid without containing the bubbles at a downstream side without making a chemical liquid discharge system large.SOLUTION: A liquid flow meter 11 comprises: a casing 1 having a liquid inflow port 1a and a liquid outflow port 1b; a first chemical liquid storage chamber 1c communicated with the liquid inflow port 1a; a second chemical liquid storage chamber 1e communicated with the liquid outflow port 1b; a connection pipe 1d connected to the first chemical liquid storage chamber 1c and the second chemical liquid storage chamber 1e; and a flow rate regulating valve 2 disposed at the connection pipe 1d. The second chemical liquid storage chamber 1e has an internal space 3 having a larger cross sectional area than the cross sectional area of the connection pipe 1d and capable of storing the bubbles 6 of a gas dissolved in a chemical liquid and is connected to an air operation valve 4 capable of discharging bubbles 7 stored in the internal space 3.SELECTED DRAWING: Figure 1
Inventors:
Satoru Tanaka
Application Number:
JP2018096903A
Publication Date:
June 30, 2021
Filing Date:
May 21, 2018
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G01F1/22
Domestic Patent References:
| JP48051353U | ||||
| JP5064731U | ||||
| JP2000298092A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita