Title:
薬液供給装置、基板処理装置、薬液供給方法、および基板処理方法
Document Type and Number:
Japanese Patent JP6900274
Kind Code:
B2
Abstract:
A chemical solution feeder feeds a chemical solution to a predetermined feed target, and includes: a feed flow path that is connected at its one end to a supply source of a chemical solution at room temperature and at its other end to a feed target, to guide the chemical solution to the feed target from the supply source; a first filter that removes particles in a chemical solution at room temperature injected from the supply source into the feed flow path; a heating unit that heats the chemical solution having passed through the first filter; and a second filter that removes particles in the chemical solution at high temperature heated by the heating unit, flowing through the feed flow path toward the feed target, wherein the first filter is a hydrophilic filter and the second filter is a hydrophobic filter.
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Inventors:
Higuchi Ayumi
Eri Fujita
Shota Iwahata
Masayuki Otsuji
Yoshirei Fujitani
Eri Fujita
Shota Iwahata
Masayuki Otsuji
Yoshirei Fujitani
Application Number:
JP2017157115A
Publication Date:
July 07, 2021
Filing Date:
August 16, 2017
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; H01L21/027
Domestic Patent References:
| JP2016192473A | ||||
| JP2009218405A | ||||
| JP2014154860A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita