Title:
塗布処理装置、塗布処理方法及びコンピュータ記憶媒体
Document Type and Number:
Japanese Patent JP6909854
Kind Code:
B2
Abstract:
This application device applies an application liquid to a substrate, said application liquid containing an optical material. The application device has: a holding section that holds the substrate; an application nozzle for discharging the application liquid to the substrate held by the holding section; a moving mechanism that relatively moves the holding section and the application nozzle in the orthogonal directions; and a liquid receiving section, which is provided, in a plan view, on both outer sides of the substrate held by the holding section, and which receives the application liquid discharged from the application nozzle.
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Inventors:
Toshihiko Nishimura
Application Number:
JP2019532511A
Publication Date:
July 28, 2021
Filing Date:
July 13, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B05C11/10; B05C5/02; B05C13/02; B05D1/26
Domestic Patent References:
| JP2013202489A | ||||
| JP2013184126A | ||||
| JP10099764A | ||||
| JP7232120A | ||||
| JP2014147857A |
Foreign References:
| WO2012140905A1 |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine